Oxidation studies of SiGe
- 期刊名称Journal of Applied Physics
- 作者LeGoues, F. K.; Rosenberg, R.; Nguyen, T.; Himpsel, F.; Meyerson, B. S.
- 卷第65卷
- 期第4期
- 印刷ISSN0021-8979
- 文件大小849.64KB
- 发表时间1989
- DOI10.1063/1.342945
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