Finite element analysis of the thermal history for Czochralski growth of large diameter silicon single crystals
- 作者A. Virzi
- 卷第97卷
- 期第1期
- 印刷ISSN0022-0248
- 文件大小713.40KB
- 发表时间1989
- DOI10.1016/0022-0248(89)90257-1
- 页码152-161
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