$[IEEE IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Salt Lake City, UT, USA (20-22 Feb. 1989)] IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Microstructures for fracture toughness characterization of brittle thin films$

[IEEE IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Salt Lake City, UT, USA (20-22 Feb. 1989)] IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots' - Microstructures for fracture toughness characterization of brittle thin films

Fan, L.-S.; Howe, R.T.; Muller, R.S.

作者Fan, L.-S.; Howe, R.T.; Muller, R.S.
文件大小582.56KB
发表时间1989
DOI10.1109/memsys.1989.77957
页码40-41

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