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[IEEE Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (12-13 June 1989)] Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Modelling spin-on film planarization properties

[IEEE Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Santa Clara, CA, USA (12-13 June 1989)] Proceedings., Sixth International IEEE VLSI Multilevel Interconnection Conference - Modelling spin-on film planarization properties

White, L.K.

作者White, L.K.
文件大小74.15KB
发表时间1989
DOI10.1109/vmic.1989.78041

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