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Calculation and measurement of the volume flow rate dependence of turbomolecular pumps on the type of gas

Calculation and measurement of the volume flow rate dependence of turbomolecular pumps on the type of gas

Reich, G.
  • 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
  • 作者Reich, G.
  • 卷第7卷
  • 期第3期
  • 印刷ISSN0734-2101
  • 文件大小600.67KB
  • 发表时间1989-5
  • DOI10.1116/1.575900
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