Surface Modifications of Electronic Materials Induced by Plasma Etching
- 期刊名称Journal of The Electrochemical Society
- 作者Oehrlein, G. S.
- 卷第136卷
- 期第7期
- 印刷ISSN0013-4651
- 文件大小1028.88KB
- 发表时间1989
- DOI10.1149/1.2097160
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