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Correlation of Void Formation with the Reduction of Carrier Activation and Anomalous Dopant Diffusion in Si-Implanted GaAs

Correlation of Void Formation with the Reduction of Carrier Activation and Anomalous Dopant Diffusion in Si-Implanted GaAs

Ko, Kei-Yu; Chen, Samuel; Lee, S. -Tong; Zheng, Longru; Tan, T.Y.

期刊名称MRS Proceedings
作者Ko, Kei-Yu; Chen, Samuel; Lee, S. -Tong; Zheng, Longru; Tan, T.Y.
卷第163卷
电子ISSN1946-4274
文件大小857.70KB
发表时间1989-1
DOI10.1557/proc-163-983

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