Structure and Properties of C-Axis Oriented AlN Films Reactively Deposited by DC Planar Magnetron Sputtering
- 期刊名称MRS Proceedings
- 作者Takahashi, Takakazu; Takeda, Fumio; Naoe, Masahiko
- 卷第167卷
- 电子ISSN1946-4274
- 文件大小1001.85KB
- 发表时间1989-1
- DOI10.1557/proc-167-277
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