ChemInform Abstract: Analysis and Reduction of Surface Damage in Silicon Following Hydrogen Passivation.
- 期刊名称ChemInform
- 作者GREGORY, J. A.; VAYMAN, Z. Y.; HANOKA, J. I.
- 卷第20卷
- 期第33期
- 印刷ISSN0931-7597
- 文件大小141.64KB
- 发表时间1989-08-15
- DOI10.1002/chin.198933014
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