SPIE Proceedings [SPIE 1988 Intl Congress on Optical Science and Engineering - Hamburg, Germany (Monday 19 September 1988)] Surface Measurement and Characterization - Application Of Non-Stereoscopic Secondary Electron Microscopy And Optical Spectroscopy For The Evaluation Of A Pronounced Microroughness
- 作者Kohl, Michael; Walter, Thomas; Gindele, Karlhanns; Bennett, Jean M.
- 卷第1009卷
- 印刷ISSN0277-786X
- 文件大小12859.68KB
- 发表时间1989
- DOI10.1117/12.949181
- 页码290-301
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