Length distribution of aluminum etch tunnels
- 作者Theodore R. Beck; Hidenori Uchi; Kurt R. Hebert
- 卷第19卷
- 期第1期
- 印刷ISSN0021-891X
- 电子ISSN1572-8838
- 文件大小650.28KB
- 发表时间1989-01
- DOI10.1007/bf01039392
- 页码69-75
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