Dissociative excitation of SiH4 by collisions with metastable argon atoms
- 作者Masaharu Tsuji; Kazunari Kobarai; Sumio Yamaguchi; Hiroshi Obase; Kazuo Yamaguchi; Yukio Nishimura
- 卷第155卷
- 印刷ISSN0009-2614
- 文件大小450.16KB
- 发表时间1989
- DOI10.1016/0009-2614(89)87190-8
- 页码481-485