Homogeneous increase in oxygen concentration in Czochralski silicon crystals by a cusp magnetic field
Hiroshi Hirata; Keigo Hoshikawa
- 作者Hiroshi Hirata; Keigo Hoshikawa
- 卷第98卷
- 期第4期
- 印刷ISSN0022-0248
- 文件大小420.74KB
- 发表时间1989
- DOI10.1016/0022-0248(89)90317-5
- 页码777-781