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Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor arraySchaufelbuhl, A.; Schneeberger, N.; Munch, U.; Waelti, M.; Paul, O.; Brand, O.; Baltes, H.; Menolfi, C.; Qiuting Huang, ; Doering, E.; Loepfe, M. · Journal of Microelectromechanical Systems · 2001