Silicon micromechanics: sensors and actuators on a chip
- 期刊名称IEEE Spectrum
- 作者Howe, R.T.; Muller, R.S.; Gabriel, K.J.; Trimmer, W.S.N.
- 卷第27卷
- 期第7期
- 印刷ISSN0018-9235
- 文件大小708.20KB
- 发表时间1990-07
- DOI10.1109/6.58424
- 页码29-31
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