Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique
- 作者S. Suzuki; S. Tuchitani; K. Sato; S. Ueno; Y. Yokota; M. Sato; M. Esashi
- 卷第21卷
- 印刷ISSN0924-4247
- 文件大小546.28KB
- 发表时间1990
- DOI10.1016/0924-4247(90)85063-a
- 页码316-319
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