Free molecular transport and deposition in cylindrical features

• 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• 作者Cale, T. S.
• 卷第8卷
• 期第4期
• 印刷ISSN0734-211X
• 文件大小869.26KB
• 发表时间1990-7
• DOI10.1116/1.584990