ChemInform Abstract: Silicon Dioxide Deposition by Atmospheric Pressure and Low-Temperature CVD Using TEOS and Ozone.
FUJINO, K.; NISHIMOTO, Y.; TOKUMASU, N.; MAEDA, K.
- 期刊名称ChemInform
- 作者FUJINO, K.; NISHIMOTO, Y.; TOKUMASU, N.; MAEDA, K.
- 卷第21卷
- 期第47期
- 印刷ISSN0931-7597
- 文件大小145.13KB
- 发表时间1990-11-20
- DOI10.1002/chin.199047264