The mechanism of plasma-induced deposition of amorphous silicon from silane
- 作者S. Vepřek; M. Heintze
- 卷第10卷
- 期第1期
- 印刷ISSN0272-4324
- 电子ISSN1572-8986
- 文件大小968.28KB
- 发表时间1990-03
- DOI10.1007/bf01460445
- 页码3-26
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