Ion beam induced diffusion and crystallization in high-dose Er implanted Si

A. Golanski; W.H. Christie; M.D. Galloway; J.L. Park; S.J. Pennycook; D.B. Poker; J.L. Moore; H.E. Harmon; C.W. White

作者A. Golanski; W.H. Christie; M.D. Galloway; J.L. Park; S.J. Pennycook; D.B. Poker; J.L. Moore; H.E. Harmon; C.W. White
印刷ISSN0168-583X
文件大小502.64KB
发表时间1991
DOI10.1016/0168-583x(91)95256-d
页码444-448

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