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Light scattering properties of x-ray lithography mask substrates

J.R. Maldonado; Y. Vladimirsky; O. Vladimirsky; I. Babich; R. Fuentes; D. Guarnieri; S.W. Whitehair; J. Cuomo

作者J.R. Maldonado; Y. Vladimirsky; O. Vladimirsky; I. Babich; R. Fuentes; D. Guarnieri; S.W. Whitehair; J. Cuomo
卷第13卷
印刷ISSN0167-9317
文件大小270.12KB
发表时间1991
DOI10.1016/0167-9317(91)90109-q
页码347-350