Defect size distribution in VLSI chips
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Glang, R.
- 卷第4卷
- 期第4期
- 印刷ISSN0894-6507
- 文件大小561.78KB
- 发表时间1991
- DOI10.1109/66.97808
- 页码265-269
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