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Liquid source metalorganic chemical vapor deposition of aluminum from triethylamine alane

Liquid source metalorganic chemical vapor deposition of aluminum from triethylamine alane

M. E. Gross; C. G. Fleming; K. P. Cheung; L. A. Heimbrook

作者M. E. Gross; C. G. Fleming; K. P. Cheung; L. A. Heimbrook
文件大小820.21KB
发表时间1991
DOI10.1063/1.348649

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