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A computer solution for the design of multipumped vacuum systems

A computer solution for the design of multipumped vacuum systems

Santeler, D. J.
  • 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
  • 作者Santeler, D. J.
  • 卷第9卷
  • 期第3期
  • 印刷ISSN0734-2101
  • 文件大小592.87KB
  • 发表时间1991-5
  • DOI10.1116/1.577414
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