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[IEEE International Electron Devices Meeting 1991 [Technical Digest] - Washington, DC, USA (8-11 Dec. 1991)] International Electron Devices Meeting 1991 [Technical Digest] - Sealed vacuum electronic devices by surface micromachining

[IEEE International Electron Devices Meeting 1991 [Technical Digest] - Washington, DC, USA (8-11 Dec. 1991)] International Electron Devices Meeting 1991 [Technical Digest] - Sealed vacuum electronic devices by surface micromachining

Zurn, S.; Mei, Q.; Ye, C.; Tamagawa, T.; Polla, D.L.

作者Zurn, S.; Mei, Q.; Ye, C.; Tamagawa, T.; Polla, D.L.
文件大小382.34KB
发表时间1991
DOI10.1109/iedm.1991.235466
页码205-208

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