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Bias Stress Induced Instabilities in Amorphous Silicon Nitride / Crystalline Silicon and Amorphous Silicon Nitride / Amorphous Silicon Structures

Bias Stress Induced Instabilities in Amorphous Silicon Nitride / Crystalline Silicon and Amorphous Silicon Nitride / Amorphous Silicon Structures

Kanicki, J.; Godet, C.; Gelatos, A. V.

期刊名称MRS Proceedings
作者Kanicki, J.; Godet, C.; Gelatos, A. V.
卷第219卷
电子ISSN1946-4274
文件大小404.20KB
发表时间1991-1
DOI10.1557/proc-219-45

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