SPIE Proceedings [SPIE San Dieg - DL Tentative - San Diego, CA (Sunday 1 July 1990)] Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection - Interference phenomenon with correlated masks and its application
- 作者Grover, Chander P.; Hane, Kazuhiro; Grover, Chander P.
- 卷第1332卷
- 印刷ISSN0277-786X
- 文件大小224.32KB
- 发表时间1991
- DOI10.1117/12.51114
- 页码624-631
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