SPIE Proceedings [SPIE San Dieg - DL Tentative - San Diego, CA (Sunday 1 July 1990)] Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection - Software concept for the new Zeiss interferometer
- 作者Doerband, Bernd; Wiedmann, Wolfgang; Wegmann, Ulrich; Kuebler, C. W.; Freischlad, Klaus R.; Grover, Chander P.
- 卷第1332卷
- 印刷ISSN0277-786X
- 文件大小489.79KB
- 发表时间1991
- DOI10.1117/12.51117
- 页码664-672
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