Fracture toughness of single crystal silicon.
- 期刊名称Journal of the Society of Materials Science, Japan
- 作者HAYASHI, Kunio; TSUJIMOTO, Shinji; OKAMOTO, Yasunori; NISHIKAWA, Tomozo
- 卷第40卷
- 期第451期
- 印刷ISSN0514-5163
- 电子ISSN1880-7488
- 文件大小1860.70KB
- 发表时间1991
- DOI10.2472/jsms.40.405
- 页码405-410