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A comparative study of wet and dry selective etching processes for GaAs/AIGaAs/lnGaAs pseudomorphic MODFETs

A comparative study of wet and dry selective etching processes for GaAs/AIGaAs/lnGaAs pseudomorphic MODFETs

M. Tong; D. G. Ballegeer; A. Ketterson; E. J. Roan; K. Y. Cheng; I. Adesida

作者M. Tong; D. G. Ballegeer; A. Ketterson; E. J. Roan; K. Y. Cheng; I. Adesida
卷第21卷
期第1期
印刷ISSN0361-5235
电子ISSN1543-186X
文件大小1820.49KB
发表时间1992-01
DOI10.1007/bf02670914
页码9-15

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