Thin gate and analog capacitor dielectrics for submicron device fabrication
- 作者Sing-Pin Tay; Joseph P. Ellul
- 卷第21卷
- 期第1期
- 印刷ISSN0361-5235
- 电子ISSN1543-186X
- 文件大小1027.20KB
- 发表时间1992-01
- DOI10.1007/bf02670919
- 页码45-55
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