Microfabrication of AFM tips using focused ion and electron beam techniques

• 作者Hongyu Ximen; Phillip E. Russell
• 印刷ISSN0304-3991
• 文件大小2303.20KB
• 发表时间1992
• DOI10.1016/0304-3991(92)90477-2
• 页码1526-1532