Modeling uphill diffusion of Mg implants in GaAs using suprem-iv
- 期刊名称Journal of Applied Physics
- 作者Robinson, Heyward G.; Deal, Michael D.; Amaratunga, G.; Griffin, Peter B.; Stevenson, David A.; Plummer, James D.
- 卷第71卷
- 期第6期
- 印刷ISSN0021-8979
- 文件大小1321.88KB
- 发表时间1992
- DOI10.1063/1.351354
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