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Compositional dependence of stress in silver copper alloys prepared by direct current magnetron sputtering

Compositional dependence of stress in silver copper alloys prepared by direct current magnetron sputtering

Kazakos, A. M.
  • 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
  • 作者Kazakos, A. M.
  • 卷第10卷
  • 期第6期
  • 印刷ISSN0734-2101
  • 文件大小776.25KB
  • 发表时间1992-11
  • DOI10.1116/1.577799
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