Force transducer etched from silicon
- 期刊名称The Journal of the Acoustical Society of America
- 作者Sickafus, Edward N.
- 卷第92卷
- 期第1期
- 印刷ISSN0001-4966
- 文件大小137.08KB
- 发表时间1992
- DOI10.1121/1.404090
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