Projection x-ray lithography implemented using point sources
- 期刊名称Soviet Journal of Quantum Electronics
- 作者Artyukov, I A; Balakireva, L L; Bijkerk, F; Vinogradov, Aleksandr V; Zorev, N N; Kozhevnikov, I V; Kondratenko, V V; Ogurtsov, O F; Ponomarenko, A G; Fedorenko, A I
- 卷第22卷
- 期第2期
- 印刷ISSN0049-1748
- 文件大小254.83KB
- 发表时间1992-02-28
- DOI10.1070/qe1992v022n02abeh003351
- 页码99-110
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