Multi-Coil System for Electron Cyclotron Resonance Plasma Generation
- 期刊名称Japanese Journal of Applied Physics
- 作者Nakamura, Tsuyoshi; Samukawa, Seiji; Ishida, Toshinori; Ishitani, Akihiko; Kawase, Yutaka
- 卷第31卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小308.43KB
- 发表时间1992-12-30
- DOI10.1143/JJAP.31.4343
- 页码4343-4347
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