Ion Energy Distribution of KrF Laser Ablation
- 期刊名称Japanese Journal of Applied Physics
- 作者Nishikawa, Yukio; Yoshida, Yoshikazu; Tanaka, Kunio
- 卷第31卷
- 印刷ISSN0021-4922
- 文件大小437.92KB
- 发表时间1992-4-15
- DOI10.1143/JJAP.31.L524
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