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Improved uniformity of GaAs by carbon control

Improved uniformity of GaAs by carbon control

R. M. Ware; P. J. Doering; B. Freidenreich; R. T. Koegl; T. Collins
  • 作者R. M. Ware; P. J. Doering; B. Freidenreich; R. T. Koegl; T. Collins
  • 文件大小246.87KB
  • 发表时间1992
  • DOI10.1088/0268-1242/7/1A/043
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