SPIE Proceedings [SPIE Micro92 - San Jose, CA (Monday 9 March 1992)] Optical/Laser Microlithography V - Shape effects of edge-line phase shifter on light intensity contrast
- 作者Nakatani, Mitsunori; Nakano, Hirofumi; Kusunose, Haruhiko; Kamon, Kazuya; Matsuda, Shuichi; Watakabe, Yaichiro; Takano, Hirozo; Otsubo, Mutuyuki; Cuthbert, John D.
- 卷第1674卷
- 印刷ISSN0277-786X
- 文件大小1312.10KB
- 发表时间1992
- DOI10.1117/12.130350
- 页码543-551
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