An analysis of dischrge parameters in excimer lamps
- 作者Sawada, Sadao; Sakai, Yosuke; Tagashira, Hiroaki
- 卷第76卷
- 印刷ISSN0019-2341
- 电子ISSN1349-838X
- 文件大小140.74KB
- 发表时间1992
- DOI10.2150/jieij1980.76.appendix_20
- 页码20-20
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