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Effect of rapid thermally nitrided titanium films contacting silicided and nonsilicided junctions

S. Chittipeddi; C. M. Dziuba; V. C. Kannan; M. J. Kelly; W. T. Cochran; B. Rambabu

作者S. Chittipeddi; C. M. Dziuba; V. C. Kannan; M. J. Kelly; W. T. Cochran; B. Rambabu
卷第22卷
期第7期
印刷ISSN0361-5235
电子ISSN1543-186X
文件大小1014.35KB
发表时间1993-07
DOI10.1007/bf02817355
页码785-791