Amorphous SiC PVD coatings
- 期刊名称Diamond and Related Materials
- 作者Knotek, O.; Löffler, F.; Wolkers, L.
- 卷第2卷
- 印刷ISSN0925-9635
- 文件大小217.25KB
- 发表时间1993-3
- DOI10.1016/0925-9635(93)90114-H
- 页码528-530
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