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[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Miami Beach, FL, USA (2005.02.3-2005.02.3)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - 18th IEEE International Conference on Micro Electro Mechanical Systems (IEEE Cat. No.05CH37610)2005
[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems - Miami Beach, FL, USA (2005.01.30-2005.02.3)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Blank page2005
[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems - Miami Beach, FL, USA (2005.01.30-2005.02.3)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Notes [Blank Page]2005
[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Miami Beach, FL, USA (2005.02.3-2005.02.3)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Copyright2005
[IEEE 2002 IEEE/LEOS International Conference on Optical MEMS - Lugano, Switzerland (20-23 Aug. 2002)] IEEE/LEOS International Conference on Optical MEMs - A silicon-based tunable optical filter designed for low power consumption and fast thermal modulationHohlfeld, D.; Zappe, H. · 2002
[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Micro-machined tunable optical filters with optimized band-pass spectrumHohlfeld, D.; Zappe, H. · 2003
[IEEE Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems - Las Vegas, NV, USA (20-24 Jan. 2002)] Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266) - Tunable thermo-optic filter for WDM applicationsHohlfeld, D.; Epmeier, M.; Zappe, H. · 2002