Low energy (100 eV) C+ ion doping into GaAs using combined ion beam and molecular beam epitaxial technology

Iida, Tsutomu; Makita, Yunosuke; Kimura, Shinji; Winter, Stefan; Yamada, Akimasa; Shibata, Hajime; Obara, Akira; Niki, Shigeru; Fons, Paul; Tsai, Yushin; Uekusa, Shin-ichiro

期刊名称Applied Physics Letters
作者Iida, Tsutomu; Makita, Yunosuke; Kimura, Shinji; Winter, Stefan; Yamada, Akimasa; Shibata, Hajime; Obara, Akira; Niki, Shigeru; Fons, Paul; Tsai, Yushin; Uekusa, Shin-ichiro
卷第63卷
期第14期
印刷ISSN0003-6951
文件大小678.87KB
发表时间1993
DOI10.1063/1.110611

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Low energy (100 eV) C+ ion doping into GaAs using combined ion beam and molecular beam epitaxial technology