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Interfacial solid-phase reactions, crystallographic structures, and electrical characteristics of Hf/(001)Si systems

Interfacial solid-phase reactions, crystallographic structures, and electrical characteristics of Hf/(001)Si systems

S. Zaima; N. Wakai; T. Yamauchi; Y. Yasuda

作者S. Zaima; N. Wakai; T. Yamauchi; Y. Yasuda
文件大小1136.29KB
发表时间1993
DOI10.1063/1.355092

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