Optimization of Ge/C ratio for compensation of misfit strain in solid phase epitaxial growth of SiGe layers
- 期刊名称Applied Physics Letters
- 作者Im, Seongil; Washburn, Jack; Gronsky, Ronald; Cheung, Nathan W.; Yu, Kin Man; Ager, Joel W.
- 卷第63卷
- 期第19期
- 印刷ISSN0003-6951
- 文件大小599.71KB
- 发表时间1993
- DOI10.1063/1.110419
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