Atmospheric pressure ionization mass spectroscopy for the study of permeation in polymeric tubing
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Ma, C.; Haider, A.M.; Shadman, F.
- 卷第6卷
- 期第4期
- 印刷ISSN0894-6507
- 文件大小546.32KB
- 发表时间1993
- DOI10.1109/66.267647
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