发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

Stress in NbCxN1-x Films Prepared by Reactive Rf Magnetron Sputtering

Stress in NbCxN1-x Films Prepared by Reactive Rf Magnetron Sputtering

S. Kiryu; A. Shoji; S. Kohjiro; S. Kodaira

作者S. Kiryu; A. Shoji; S. Kohjiro; S. Kodaira
文件大小602.87KB
发表时间1993
DOI10.1143/JJAP.32.L834

← 返回【学霸图书馆】主页