Heterogeneous Kinetics of The Chemical Vapor Deposition of Silicon Carbide From Methyltrichlorosilane
- 期刊名称MRS Proceedings
- 作者Papasouliotis, George D.; Sotirchos, Stratis V.
- 卷第334卷
- 电子ISSN1946-4274
- 文件大小499.48KB
- 发表时间1993-1
- DOI10.1557/proc-334-111
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